Abstract：TiN coating was deposited on the surface of cemented carbide substrate by multi-arc ion plating. The influence of N2/Ar flow rate on the distribution of microparticles (MPs) and mechanical properties of TiN coating was studied. The surface morphologies of TiN film were observed by scanning electron microscope. The amount and size of MPs were analyzed by ImageJ software. Scratch spectrometer and nanoindenter were used to evaluate mechanical properties of TiN coating. The results show that the maximum size and average diameter of MPs decrease with the increase of N2 flow， and the adhesion strength of TiN coating goes up， while the micro-hardness of TiN coating increases firstly and then decreases.
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2016, Vol. 26 
