（1. State Key Laboratory of Advanced Metallurgy， University of Science and Technology Beijing， Beijing 100083， China 2. School of Metallurgical and Ecological Engineering， University of Science and Technology Beijing， Beijing 100083， China）
Abstract：In view of the serious environmental pollution problems caused by the current large accumulation of polysilicon cutting waste， a process to prepare SiC by adding activated carbon to high temperature reaction was carried out by using the polysilicon cutting waste as raw material. The polysilicon cutting waste was leached by HCl solution to remove the impurity Fe. Firstly， the thermodynamics of the reactions between the components in waste and carbon was calculated. Then， the differential thermal analysis （DTA）， X-ray diffraction （XRD） and scanning electron microscope （SEM） were used to analyze the effects of reaction temperature， reaction time and impurity Fe on the phases and morphology of the products. It is found that the main components of the cutting waste after hydrochloric acid leaching are silicon carbide and silicon. The iron must be removed in advance before high temperature treatment because the carbon cannot react with Fe-Si alloy （FeSi， Fe5Si3， etc.） to generate SiC. When the reacted temperature is higher than 1 400 ℃， the reaction between activated carbon and the treated waste is quick， and silicon carbide with high purity is obtained. Meanwhile， the morphology of the produced SiC particles are the same as that of the carbon particles.
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2017, Vol. 27 
