（1. State Key Laboratory of Powder Metallurgy， Central South University， Changsha 410083， China 2. Guangdong Institute of New Materials， Guangzhou 510651， China）
Abstract：Diamond-like carbon （DLC） films were deposited successfully by high power impulse hybrid DC magnetron sputtering. The orthogonal experiments of changing working air pressure， bias voltage and target voltage were carried out. The microstructure and properties were examined by SEM， nano hardness tester， Raman spectroscopy and 3D contourgraph apparatus. The results show that the thickness of DLC film is about 1 μm and the maximum hardness is up to 24.29 GPa. In Raman spectrum， the G peak and D peak at 1 520-1 540 cm－1 and 1 330-1 370 cm－1 were obtained by peak fitting using Gaussian fitting， respectively. The bias voltage has the most significant effect on thickness， hardness， density and sp3 content， while the target voltage and the air pressure has relatively smaller effect on the microstructure and properties of the films. With the increase of the bias voltage， the thickness and the peak intensity ratio Id/Ig decrease， the hardness and sp3 content increase gradually， and the film microstructure transforms from loose porous columnar structure to dense structure with less pores.
高 迪，林松盛，许 伟，邹俭鹏，杨洪志. 高功率脉冲复合直流磁控溅射制备类金刚石薄膜的结构与性能[J]. , 2019, 29(01): 18-23.
GAO Di，，LIN Song-sheng，XU Wei，，ZOU Jian-peng，YANG Hong-zhi. Microstructure and performance of diamond-like carbon films fabricated by high power impulse hybrid DC magnetron sputtering. , 2019, 29(01): 18-23.
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2019, Vol. 29 
