Abstract：Beryllium has special physical properties and is used in nuclear and aerospace applications. As a new
analysis technique, EBSD (Electron backscatter diffraction) has been used more and more widely in beryllium production.
The low calibration rate of beryllium was found by the State Key Laboratory of Rare Metal Materials in
the practical application of EBSD analysis of beryllium. In this paper, the residual stress on the surface of beryllium
sample can be effectively reduced by optimizing the sample preparation parameters, the influence of background
and noise signal can be reduced by adjusting the gain parameters of EBSD, and the identification of the disturbed
information can be improved by adjusting the parameters of the parser, the calibration rate of beryllium was
increased by an average of 27% by EBSD.
2022, Vol. 32 
