Abstract：Molybdenum rods with different grain sizes were prepared by powder metallurgy method, and the target
materials were processed. The microstructure and mechanical properties of the products were analyzed by metallographic
technique and microhardness test, and the reasons for the differences in sputtering deposition effect of molybdenum
during coating preparation were studied. The results show that the grains of molybdenum target are uniform
and fine, and the larger the area ratio of grain boundary is, the better the sputtering deposition effect of molybdenum
target is. The tensile strength, elongation and hardness of molybdenum target increase with the decrease of grain size.
2022, Vol. 32 
