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| Tb coating preparation by magnetron sputtering and
magnetic properties of grain boundary diffused cerium magnets |
| CHEN Xinshuo，FENG Haibo，LI Anhua |
| Division of Functional Materials，Central Iron & Steel Research Institute，Beijing 100081 |
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Abstract Homogenous heavy rare earth coating can be prepared and its thickness controlled by the magnetron
sputtering method. In this paper, relationship between the Tb coating homogenization and parameters of magnetron
sputtering was investigated, the Tb coating thickness control and coercivity improvement of cerium magnets was
quantitative analyzed. The optimal homogenous Tb coating can be obtained when deposition rate was 3.23-3.65×
10- 3 mg/(mm2 · min), and the coating thickness is proportional to sputtering time. When the Tb coating thickness
was 4.87 μm, the coercivity of grain boundary diffused cerium magnets improved from 11.80 kOe to 16.56 kOe,
and the temperature coefficient of coercivity was -0.373%/℃.
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Received: 20 April 2020
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2021, Vol. 31 
