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| Analysis of difference in sputtering deposition effect of molybdenum target |
| LIN Bingtao1，WANG Na2，YANG Minghui2，WANG Chengyang1，ZHANG Baohong1，
XIONG Ning1 |
| 1. Advanced Technology & Materials Co. Ltd，Beijing 100081，China；2. Aerospace Research Institute of
Materials & Processing Technology，Beijing 100076，China |
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Abstract Molybdenum rods with different grain sizes were prepared by powder metallurgy method, and the target
materials were processed. The microstructure and mechanical properties of the products were analyzed by metallographic
technique and microhardness test, and the reasons for the differences in sputtering deposition effect of molybdenum
during coating preparation were studied. The results show that the grains of molybdenum target are uniform
and fine, and the larger the area ratio of grain boundary is, the better the sputtering deposition effect of molybdenum
target is. The tensile strength, elongation and hardness of molybdenum target increase with the decrease of grain size.
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Received: 23 August 2021
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Corresponding Authors:
熊宁（1973—），女，博士，正高级工程师，主要研究方向为难熔金属及其复合材料。
E-mail: linbingtao@atmcn.com
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2022, Vol. 32 
