Deposition and corrosion properties of FeNiCoCrMn high entropy alloy films under different substrate temperature
SHI Yan-yan 1， LUO Yong-chun1,2， ZHANG Guo-qing1
1.School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050,Gansu，China 2. State Key Laboratory of Advanced Processing and Recycling of Non-ferrous Matals, Lanzhou University of Technology, Lanzhou 730050, Gansu，China
Abstract：FeNiCoCrMn high entropy alloy films were deposited by radio frequency magnetron sputtering method in single crystal Si (100) and 304 stainless steel substrate. The composition of the films was analysised by EPMA, the phase structure was analysised by XRD, the films thickness and surface morphologies of films which were deposited under different temperature were analysised by SEM, the potentiodynamic polarization curves of 304 stainless steel and the films were tested in 1 mol/L H2SO4 solution. The results show that element content of target and different regions on the films are consistent, components are close to equal mole ratio and film components uniform, films are amorphous structure under 100 ℃, 200 ℃, 300 ℃, but films are crystal structure under 400 ℃, 500 ℃. With the rise of substrate temperature, films thickness becomes thin, at the same time, particles of film surface are bigger and bigger, columnar structure of cross section is more and more obvious; high entropy alloy films corrosion property in 1 mol/L H2SO4 solution is better than that of 304 stainless steel, and with the increase of substrate temperature, the corrosion property of films is degradative, the corrosion property of films was deposited on 100 ℃ is best.
石彦彦， 罗永春 ， 张国庆. 不同基底温度FeNiCoCrMn高熵合金薄膜的制备及耐腐蚀性能的研究[J]. , 2016, 23(4): 35-39.
SHI Yan-yan ， LUO Yong-chun， ZHANG Guo-qing. Deposition and corrosion properties of FeNiCoCrMn high entropy alloy films under different substrate temperature. , 2016, 23(4): 35-39.
2016, Vol. 23 
