Abstract:In order to improve the fretting wear resistance of titanium alloy surface,MoS2-Ti/Cu-Ni-In multilayer solid lubrication films (modulation period is 2μm) with different modulation ratios (2:1, 1:1, 1:2) were deposited on the surface of titanium alloy by non balanced magnetron sputtering technique. The morphology, binding force, phase, hardness, fretting wear behavior and wear scar of the multilayer films were analyzed by scanning electron microscope, scratch tester, XRD, vickers micro hardness tester, fretting wear testing machine and 3D surface profile instrument. The results shows that, MoS2-Ti/Cu-Ni-In multilayer films alternating structure is clear and the structure of multilayer films is compact. After the 12000 fretting cycles, the MoS2-Ti/Cu-Ni-In multilayer films with the modulation ratio of 2:1 and 1:1 were measured. The average fretting coefficient of the multilayer films at room temperature is 0.071 and 0.065, the wear amount was 0.087mm3 and 0.045mm3. The multilayer films has excellent anti-fretting wear effect.