Abstract：FeCoV film is prepared as magnetic susceptibility materials used for current sensor by magnetic sputtering. Magnetostrictive curve of FeCoV alloys is measured by strain gauge methods. The magnetostriction coefficient is 97ppm. SEM photos show that FeCoV film is with the good density and uniformly continuous grains. columnar crystal grains are observed from section of film. FeCoV film sample grows in （110） orientation with obvious uniaxial anisotropy. It is found the tendence of magnetostrictive curve is in a accordance with the current response of current sensor with the range of linearity, which contribute to prepare for magnetic sensor with high sensitivity. The current sensor probe is prepared by SAW reflection delay line of 80Hz. The measured results show that the FeCoV film sensor exerts higher sensitivity of 6.7kHz/A.
2021, Vol. 28 