Abstract：P-type amorphous silicon (a-Si) thin film was deposited by radio frequency magnetron sputtering. And the structure of the prepared film was analyzed by X-ray diffractometer (XRD), Raman spectrometer (Raman) and transmission electron microscope (TEM). The influence of sputtering process on film mass was investigated, and the true value range of film mass was determined by calculating its uncertainty. It is exhibited that the deposition rate of film increases with the increase of sputtering power during the magnetron sputtering process. The introduction of sputtering bias can obviously improve the bonding strength between the film and the substrate. However, the bias will cause a certain mass loss of nickel substrate during the initial stage of pre-splash and deposition process. Moreover, the more mass loss of nickel substrate leaded by high bias pressure will results in the large measurement error in determining the mass of active materials for the a-Si thin film. By optimizing the magnetron sputtering process, the thin film exhibits good adhesion to the substrate, and the substrate loss is small in the initial stage of pre-splash and deposition process when the sputtering power of 300 W, bias voltage of 50 V, and deposition time of 3 h. At this time, the mass for active material of the film is 0.22 mg, the measurement uncertainty is ±0.01 mg, and the range of mass is [0.21 mg, 0.23 mg]. The electrochemical analysis results show that the a-Si thin film treated with gaseous hydrogen has electrochemical hydrogen storage reaction and high discharge capacity (1682.7~1759.2 mAh?g-1) in the ionic liquid.
[1] 马圆,范崇飞,武建刚.硅基太阳能电池专利技术现状及其发展趋势综述[J].金属功能材料, 2012, 19(04):39-45.[2] Joseph J, Singh S G, Vanjari S. Ultra-smooth e-beam evaporated amorphous silicon thin films–A viable alternative for PECVD amorphous silicon thin films for MEMS applications [J]. Materials Letters, 2017, 197(Complete):52-55.[3] Salah M, Murphy P, Hall C, et al. Pure silicon thin-film anodes for lithium-ion batteries: A review [J]. Journal of Power Sources, 2019, 414 (FEB.28):48-67.[4] Zhang Y Q, Xia X H, Wang X L, et al. Silicon/graphene-sheet hybrid film as anode for lithium ion batteries [J]. Electrochemistry Communications, 2012, 23(Complete):17–20.[5] Meng T, Young K, Beglau D, et al. Hydrogenated amorphous silicon thin film anode for proton conducting batteries [J]. Journal of Power Sources, 2016, 302(JAN.20):31-38.[6] 胡仁宗, 杨黎春, 朱敏. 高能量密度锂离子电池薄膜负极材料的研究进展[J]. 科学通报, 2013(31):3140.[7] Kalisvaart W P, Niessen R, Notten P. Electrochemical hydrogen storage in MgSc alloys: A comparative study between thin films and bulk materials [J]. Journal of Alloys and Compounds, 2012, 417(1-2):280-291.[8] Gao R, Tang J, Terabe K, et al. Preparation of Layered Si Materials as Anode for Lithium-Ion Batteries [J]. Chemical Physics Letters, 2019, 730.[9] 刘海龙. 磁控溅射法制备非晶硅薄膜及其性能研究[D].东北大学,2012.[10] 刘明, 陈书赢, 马国政,等. 热喷涂涂层/基体异质界面结合强度优化理论与方法现状研究[J]. 机械工程学报, 2020, v.56(10):80-93.[11] 李云龙, 付花睿, 张霄, 周广迪, 游才印, 沈乾龙. 磁控溅射制备低相转变温度氧化钒薄膜[J].金属功能材料, 2017, 24(03):18-24.[12] 陈立宝. 锂离子电池高容量硅基薄膜负极材料的研究[J]. 微系统,冶金所学位论文, 2007.[13] Wang Y H, He Y, Xiao R J, et al. Investigation of crack patterns and cyclic performance of Ti-Si nanocomposite thin film anodes for lithium ion batteries [J]. Journal of Power Sources, 2012, 202(Mar.15):236-245.[14] Chen L B, Xie J Y, Yu H C, et al. An amorphous Si thin film anode with high capacity and long cycling life for lithium ion batteries [J]. Journal of Applied Electrochemistry, 2009, 39(8):1157-1162.[15] 毛亚雄. 锂离子电池硅基薄膜负极的磁控溅射法制备与电化学性能[D][16] Evshchik E. Magnetron Sputtering Silicon Thin Film Electrodes for Lithium-Ion Batteries [J]. International journal of electrochemical ence, 2018, 13:2860-2874.[17] Wang Y, Zhang Y, Zhou B, et al. In-situ observation of the growth behavior of ZnAl layered double hydroxide film using EQCM [J]. Materials & design, 2019, 180:107952.[18] Demirkan M T, Trahey L, Karabacak T. Cycling performance of density modulated multilayer silicon thin film anodes in Li-ion batteries [J]. Journal of Power Sources, 2015, 273:52-61.[19] 费业泰. 误差理论与数据处理(第4版)[M]. 机械工业出版社, 2000.[20] 宋明顺. 测量不确定度评定与数据处理[M]. 中国计量出版社, 2000.[21] D'Agostini G. Guide to the expression of uncertainty in measurement [J]. Iso Tag4, 1995, 43(4):S161.[22] 陈凌峰. 标准不确定度A类评定中极差法的深入讨论[J]. 计量学报, 2019, 40(02):347-352.
2022, Vol. 29 