Abstract：TiAl alloy targets were prepared by pressureless sintering and hot pressing sintering respectively， and TiAl hard coatings were prepared by sputtering deposition method. The microstructure and phase composition of the hard coatings were analyzed， and the high temperature oxidation resistance and mechanical properties of the coatings were also tested. The results show that the hard coating of target material prepared by pressureless sintering is poor in compactness， uneven in dispersion， fast in oxidation rate and only 1 798 HV in microhardness. While the hard coating of target material prepared by hot pressing sintering has the advantages of high density， low porosity， fine grain size， uniform distribution， significantly improved oxidation resistance， which microhardness is as high as 3 165 HV， 76% higher than the former.
收稿日期: 2017-12-19
出版日期: 2018-08-29
基金资助:广东省高职教育品牌专业建设项目成果
通讯作者:
戴护民
E-mail: 104666515@qq.com
引用本文:
戴护民，许巨忠. TiAl镀膜靶材制备工艺对硬质涂层的性能影响研究[J]. , 2018, 28(04): 17-20.
DAI Hu-min，XU Ju-zhong. Effect of TiAl target preparation process on properties of hard coatings. , 2018, 28(04): 17-20.
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2018, Vol. 28 
