Abstract：Five kinds of Mo-Ti alloys with different composition were prepared with high purity titanium powder
and molybdenum powder by hot pressing at 1 600 ℃ and 40 MPa for 3 h under the protection of Argon. Effects of
titanium content on mechanical property and microstructure of the prepared Mo-Ti alloys were studied. Results obtained
show that Mo and Ti atoms can form displacement solid solution，and Mo-Ti alloy is brittle at room temperature.
With titanium content increasing from 10 atm.% to 50 atm.% ，grain size increases from about 7 μm to
15 μm，relative density increases from 95.8% to 99.5%，rockwell hardness increases from 22.3 HRC to 45.5 HRC，
and bending strength increases from 396 MPa to 680 MPa. Mo-50% Ti has the best performance in all aspects，
which has a certain significance for the preparation of Mo-Ti alloy target and the study of sputtering performance.
2020, Vol. 30 
