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| Study on the ultra-smooth polishing property of pressureless sintered SiC |
| LIU?Xiu1，HE Zhi-yong2，QIAN Fen-ling2，WANG Xiao-bo2，ZHANG Qi-fu1,2 |
1. Central Iron and Steel Research Institute， Beijing 100081， China
2. China Iron and Steel Research Institute Group， Beijing 100081， China |
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Abstract Pressureless sintering technique was used to prepare SiC mirror material. The effects of three kinds of abrasives， such as diamond， Cr2O3 and SiO2 on the polishing property of sintered SiC samples were analyzed. Experimental results indicate that physical properties of sintered SiC can meet the requirements of mirror material. The hardness difference between diamond abrasive and sintered SiC ceramic is minimal. During ultra-smooth polishing process， defects such as dislocation and vacancy on the SiC surface are the least， which caused by the shape of diamond abrasive. Therefore surface of sintered SiC polished by diamond abrasive is the best. The surface roughness of sintered SiC is 0.789 nm(RMS) and surface accuracy is[0.007 λ(λ＝0.632 8 μm)，] which satisfies the request of mirror.
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Received: 19 May 2016
Published: 29 August 2016
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2016, Vol. 26 
