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| Application of hot isostatic pressing technology in preparation of high-quality targets |
| Lü Zhoujin1，CHE Lida1，WU Zhanfang1，LI Haofeng1，ZHANG Pengjie1，HE Jing1，
LI Xiangyang2 |
| （1. CISRI HIPEX Technology Co., Ltd., Beijing 100081, China; 2. China Iron & Steel Research Institute Group,
Beijing 100081, |
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Abstract With the rapid development of electronic information industry, the market puts forward higher require‐
ments for the quality of targets. As a material forming and special heat treatment method, hot isostatic pressing
technology has become an important method to prepare high-quality targets after years of development. The development of hot isostatic pressing technology, the working principle of equipment and the performance requirements
of refractory metal targets are briefly introduced. The application of hot isostatic pressing technology in the prepara‐
tion of high-quality refractory metal Mo, W, Cr and their alloy targets, and the influence of hot isostatic pressing
technology on its microstructure and sputtering properties are highlig
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Received: 09 May 2022
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Corresponding Authors:
吴战芳（1988—），男，博士，主要研究方向为材料热处理、粉末冶金及热等静压新材料制备技术等。
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2022, Vol. 32 
