|
|
|
| Preparation of SiC powder by using polysilicon cutting waste |
| WU Yue-dong1，ZHANG Guo-hua1，HAN Pei-wei2，ZHOU Guo-zhi1 |
（1. State Key Laboratory of Advanced Metallurgy， University of Science and Technology Beijing， Beijing 100083， China
2. School of Metallurgical and Ecological Engineering， University of Science and Technology Beijing， Beijing 100083， China） |
|
|
|
|
Abstract In view of the serious environmental pollution problems caused by the current large accumulation of polysilicon cutting waste， a process to prepare SiC by adding activated carbon to high temperature reaction was carried out by using the polysilicon cutting waste as raw material. The polysilicon cutting waste was leached by HCl solution to remove the impurity Fe. Firstly， the thermodynamics of the reactions between the components in waste and carbon was calculated. Then， the differential thermal analysis （DTA）， X-ray diffraction （XRD） and scanning electron microscope （SEM） were used to analyze the effects of reaction temperature， reaction time and impurity Fe on the phases and morphology of the products. It is found that the main components of the cutting waste after hydrochloric acid leaching are silicon carbide and silicon. The iron must be removed in advance before high temperature treatment because the carbon cannot react with Fe-Si alloy （FeSi， Fe5Si3， etc.） to generate SiC. When the reacted temperature is higher than 1 400 ℃， the reaction between activated carbon and the treated waste is quick， and silicon carbide with high purity is obtained. Meanwhile， the morphology of the produced SiC particles are the same as that of the carbon particles.
|
|
Received: 07 April 2016
Published: 09 June 2017
|
|
|
|
| [1]ZHU J J, HUANG Q Q, YANG S Q, et al. Recycling of SiC in Crystalline Silicon Cutting Fluid[J]. Advanced Materials Research, 2013, v622: 504-507.[2]BRAGA. A. F. B, MOREIRA. S. P, ZAMPIERI. P. R,et al. New processes forthe production of solar-grade polycrystalline silicon: Areview[J]. Solar Energy Materials and Solar Cells, 2008, 92(4): 418-424.[3] 邢鹏飞,赵培余,郭菁,等.太阳能级多晶硅切割废料浆的综合回收[J].材料报道,2011, 25(1):75-79.[4] 铁生年,侯思懿,汪长安,王涛.新能源硅产业碳化硅切割废料回收利用研究进展[J].科技导报2013，31(4):74-79.[5] 黄美玲，熊裕华，魏秀琴，等.硅片线锯砂浆中硅粉与碳化硅粉的泡沫浮选分离回收[J] . 电子元件与材料,2010,29(4):74-77．[6]HORIO M. Recycling system of wire saw abrasive grain slurry and centrifugal separators: US, 6615817[P]. 2003. 09. 09.[7]CHANG Y C. Apparatus for recycling the disposed slurry produced in the manufacturing process of the silicon wafer: Korea, 2008013327[P]. 2008. 01. 31.[8]LIN Y C, WANG T Y, LAN C W, et al. Recovery of silicon power from kerf loss slurry by centrifugation[J]. power technology, 2010, 200(3): 216.[9] 杨建锋, 高积强, 陈畅, 等. 一种从切割废砂浆中回收硅粉和碳化硅粉的方法: 中国, CN101130237A[P]. 2008-02-27．[10] 王伟，薛涛，金志浩，乔冠军. 一种新型多孔SiC 的制备与性能研究[J].无机材料学报 2008, 23(1): 109-113.[11]ZHANG X J, ZHANG Y T,HAN J C.Study on the combustion synthesis of Si3N4-SiC-TiN ceramics[J].Journal of Functional Materials, 2015, 9(37): 1494-1499.[12]MAHDJOUBA H, ROYA P, FILIATREB C. The fact of the slurry for mulationu pon the morphology of spray-dried triastabilize dzireonia Partieles[J]. European Ceramic, 2003, 23: 1637-1648.[13]PROCHAZKA S. Effect of Boron and Carbon on Sintering of Si C[J]. American Ceramic, 1975, 58: 51-56. [14]SUYAMA S,KAMEDA T, ITOH Y. Development of high strength reaction silicon carbide[J]. Diamond and Related Materials. 2003, (12): 1201- 1204.[15]HAYNES. W. M. CRC Handbook of Chemistry and Physics, CRC Press/Taylor and Francis[M], 95th Edition, Boca Raton, FL, Internet Version 2015, accessed December 2014.[16] 束成祥. 反应烧结SiC陶瓷材料的制备及其结构与性能.合肥: 合肥工业大学硕士论文，2013. |
|
|
|
2017, Vol. 27 
