高功率脉冲复合直流磁控溅射制备类金刚石薄膜的结构与性能

doi:10.13228/j.boyuan.issn1006-6543.20180118

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Abstract Diamond-like carbon （DLC） films were deposited successfully by high power impulse hybrid DC magnetron sputtering. The orthogonal experiments of changing working air pressure， bias voltage and target voltage were carried out. The microstructure and properties were examined by SEM， nano hardness tester， Raman spectroscopy and 3D contourgraph apparatus. The results show that the thickness of DLC film is about 1 μm and the maximum hardness is up to 24.29 GPa. In Raman spectrum， the G peak and D peak at 1 520-1 540 cm－1 and 1 330-1 370 cm－1 were obtained by peak fitting using Gaussian fitting， respectively. The bias voltage has the most significant effect on thickness， hardness， density and sp3 content， while the target voltage and the air pressure has relatively smaller effect on the microstructure and properties of the films. With the increase of the bias voltage， the thickness and the peak intensity ratio Id/Ig decrease， the hardness and sp3 content increase gradually， and the film microstructure transforms from loose porous columnar structure to dense structure with less pores.

Key words： high power pulse magnetron sputtering diamond-like carbon film microstructure nano hardness

Received: 02 August 2018 Published: 22 February 2019

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	ZOU Jian-Peng
	GAO Di

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ZOU Jian-Peng,GAO Di. Microstructure and performance of diamond-like carbon films fabricated by high power impulse hybrid DC magnetron sputtering[J]. , 2019, 29(01): 18-23.

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http://edit.chinamet.cn/Jweb_fmyjgy/EN/10.13228/j.boyuan.issn1006-6543.20180118 OR http://edit.chinamet.cn/Jweb_fmyjgy/EN/Y2019/V29/I01/18

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