Abstract：［(CrAlSiN)d/(Si3N4)0.33nm］n multilayer coatings with different CrAlSiN layer thicknesses (d) and fixed Si3N4 layer thickness(0.33 nm) were prepared using a reactive magnetron co-sputtering system. The effects of CrAlSiN layer thickness on the structure, morphology, and mechanical properties of the ［(CrAlSiN)d/(Si3N4)0.33nm］n multilayer coatings were investigated. The ［(CrAlSiN)d/(Si3N4)0.33nm］n multilayer coatings had good mechanical properties and displayed the highest hardness of 34 GPa when d = 3.2 nm.The oxidation experiments of the (CrAlSiN)d/(Si3N4)0.33nm］n multilayer coatings were performed at 700, 800 ℃ and 900 ℃ for 2 h in air.The results showed that the samples displayed good oxidation resistance and still had a high hardness of 28.5 GPa after 800 ℃ oxidation for 2 h in air.
2016, Vol. 23 
