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TiAl镀膜靶材制备工艺对硬质涂层的性能影响研究
戴护民,许巨忠
Effect of TiAl target preparation process on properties of hard coatings
DAI Hu-min,XU Ju-zhong
. 2018, (04): 17 -20 .  DOI: 10.13228/j.boyuan.issn1006-6543.20170163