Study on N2/Ar flow parameters of TiN coating deposited by multi-arc ion plating

CHEN Chang-hao，JIN Yong-zhong，CHEN Jian，CAI Yu，YU Xue-jin，LONG Guo-jun

Powder Metallurgy Industry ›› 2016, Vol. 26 ›› Issue (03) : 44-48.

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Powder Metallurgy Industry ›› 2016, Vol. 26 ›› Issue (03) : 44-48. DOI: 10.13228/j.boyuan.issn1006-6543.20150055

Study on N2/Ar flow parameters of TiN coating deposited by multi-arc ion plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 26(03): 44-48 https://doi.org/10.13228/j.boyuan.issn1006-6543.20150055

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