Microstructure and performance of diamond-like carbon films fabricated by high power impulse hybrid DC magnetron sputtering

GAO Di，，LIN Song-sheng，XU Wei，，ZOU Jian-peng，YANG Hong-zhi

Powder Metallurgy Industry ›› 2019, Vol. 29 ›› Issue (01) : 18-23.

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Powder Metallurgy Industry ›› 2019, Vol. 29 ›› Issue (01) : 18-23. DOI: 10.13228/j.boyuan.issn1006-6543.20180118

Microstructure and performance of diamond-like carbon films fabricated by high power impulse hybrid DC magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 29(01): 18-23 https://doi.org/10.13228/j.boyuan.issn1006-6543.20180118

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