Analysis of difference in sputtering deposition effect of molybdenum target

LIN Bingtao，WANG Na，YANG Minghui，WANG Chengyang，ZHANG Baohong，XIONG Ning

Powder Metallurgy Industry ›› 2022, Vol. 32 ›› Issue (03) : 127-130.

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Powder Metallurgy Industry ›› 2022, Vol. 32 ›› Issue (03) : 127-130. DOI: 10.13228/j.boyuan.issn1006-6543.20210108

Analysis of difference in sputtering deposition effect of molybdenum target

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 32(03): 127-130 https://doi.org/10.13228/j.boyuan.issn1006-6543.20210108

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