Study on the preparation process of Al-doped-ZnO (AZO) ceramic target

TANG Peixin，Lü Zhoujin，CHE Lida，WU Zhanfang

Powder Metallurgy Industry ›› 2023, Vol. 33 ›› Issue (04) : 22-26.

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Powder Metallurgy Industry ›› 2023, Vol. 33 ›› Issue (04) : 22-26. DOI: 10.13228/j.boyuan.issn1006-6543.20220173

Study on the preparation process of Al-doped-ZnO (AZO) ceramic target

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 33(04): 22-26 https://doi.org/10.13228/j.boyuan.issn1006-6543.20220173

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