Effect of sintering temperature on the microstructure and sputtering film performance of the Ni-W alloy target

GAO Ming, WANG Wenyan, YUE Shenwei, XIE Jingpei, YANG Leilei, CUI Yunfeng

Powder Metallurgy Industry ›› 2025, Vol. 35 ›› Issue (01) : 45-52.

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Powder Metallurgy Industry ›› 2025, Vol. 35 ›› Issue (01) : 45-52. DOI: 10.13228/j.boyuan.issn1006-6543.20230092
Research and Development

Effect of sintering temperature on the microstructure and sputtering film performance of the Ni-W alloy target

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 35(01): 45-52 https://doi.org/10.13228/j.boyuan.issn1006-6543.20230092

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