Application Research Process on TiAl Alloy Film in MEMS Field
SHUI Lu-yu1, 2, YAN Biao1, 2
（1. School of Materials Science and Engineering, Tongji University, Shanghai 201804, China 2. Shanghai Key Lab. of D&A for Metal-Functional Materials, Shanghai 201804, China）
Abstract：As a rising advanced manufacturing technology, MEMS (Micro Electromechanical System) is making great sense, and becoming a research hotspot. Along with the development of research of TiAl alloy thin film, the application performance of MEMS is greatly raised, owing to the outstanding high temperature property and resistance to corrosion from TiAl alloy thin film. The preparative technique, growth pattern and micro-structure of TiAl thin film are summarized. The application of TiAl alloy thin film in the MEMS field is also introduced.
水露雨 ，严彪 . TiAl合金薄膜在MEMS领域中的应用研究和进展[J]. , 2014, 21(3): 44-48.
SHUI Lu-yu, , YAN Biao, . Application Research Process on TiAl Alloy Film in MEMS Field. , 2014, 21(3): 44-48.
2014, Vol. 21 
