The influence of substrate temperature on the structure and electrical properties of FeCrCoNiMn high entropy alloy nitride films
YANG Ke- jiang1,ZHANG Guo- qing1,WANG Liang- bing2,LUO Yong- chun1,2
1. Department of Materials Science and Engineer, Lanzhou University of Technology, Lanzhou 730050, Gansu, China 2. State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou 730050, Gansu, China
Abstract：The nanostructured FeCrCoNiMn high entropy alloy nitride films were prepared on Si(100) substrate by radio- frequency reactive magnetron sputtering. The influence of substrate temperature(40, 300, 500℃) on morphology, elemental composition, microstructure and electrical resistivity of the films were investigated by XRD, FESEM, AFM, EPMA, XPS and four point probe tester. The study showed that the substrate temperature had a significant influence on the morphology, microstructure and electrical conductivity of the films. With the increase of substrate temperature, surface roughness and the particles/grain size of films increased gradually. The films formed metal nitrides Mn3N2, CrN, Cr2N and CrN, the Fe, Ni, Co elements were existed in the form of Fe- Ni- Co alloy. The electrical resistivity of the high entropy alloy film was as high as 131. 78mΩ·cm. With increasing substrate temperature, the electrical resistivity of the alloy nitride films gradually decreased from 6. 14 to 0. 43mΩ·cm, and the resistivity of alloy nitride films was significantly lower than that of the high entropy alloy film, and the resistivity reached a minimum value of 0. 43mΩ·cm at 500℃ substrate temperature.
杨克蒋，张国庆，汪亮兵，罗永春 . 衬底温度对FeCrCoNiMn高熵合金氮化物薄膜组织结构和电性能的影响[J]. , 2018, 25(2): 36-42.
YANG Ke- jiang,ZHANG Guo- qing,WANG Liang- bing,LUO Yong- chun,. The influence of substrate temperature on the structure and electrical properties of FeCrCoNiMn high entropy alloy nitride films. , 2018, 25(2): 36-42.
参考文献：[1] Jienwei Yeh, Swekai Chen, Sujien Lin, et al. Nanostructured high-entropy alloys with multiple principal elements: novel alloy design concepts and outcomes[J]. Advanced engineering materials,2004,6(5):299-303.[2] Yiping Lu, Hui Jiang, Sheng Guo, et al. A new strategy to design eutectic high-entropy alloys using mixing enthalpy[J]. Intermetallics,2017,91:124-128.[3] 郭卫凡. 多主元高熵合金的研究进展[J]. 金属功能材料,2009,1(16):49-53.[4] Jienwei Yeh. Physical Metallurgy of High-Entropy Alloys[J]. JOM,2015,67(10):1-8.[5] Yinfeng Wang, Shengguo Ma, Xiaohua Chen, et al. Optimizing Mechanical Properties of AlCoCrFeNiTix High- Entropy Alloys by Tailoring Microstructures[J]. Acta Metallurgica Sinica,2013,26(3):277-284.[6] Zitang Zhang, Eugen Axinte, Wenjuan Ge, et al. Mircrostructure, mechanical properties and corrosion resistance of CuZrY/Al, Ti,Hf series high-enropy alloys[J]. Materials and Design,2016,108:106-113.[7] Hadraba H, Chlup Z, Dlouhy A, et al. Oxide dipersion strengthened CoCrFeNiMn high-entropy alloy [J]. Materials Science and Engineering,2017,689:252- 256.[8] Yong Zhang, Tingting Zuo, Zhi Tang, et al. Microstructures and properties of high-entropy alloys[J]. Progress in materials science,2014,61:1-93.[9] Jiemin Li, Xiao Yang, Ruanli Zhu, et al. Corrosion and Serration Behaviors of TiZr0.5NbCr0.5VxMoy High Entropy Alloys in Aqueous Environments[J]. Metals,2014,4:597-608.[10] B Ren, Zx Liu, L Shi, et al. Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering[J]. Applied Surface Science,2011,257:7172-7178.[11] Wenjie Sheng, Xiao Yang, Cong Wang, et al. Nano-crystallization of High-Entropy Amorphous NbTiAlSiWxNy films prepared by magnetron sputtering[J]. Entropy,2016,18(6):226.[12] Shihchang Liang, Ducheng Tsai, Zuechin Chang, et al. Stuctural and mechanical properties of multi-element (TiVCrZrHf) N coatings by reactive magnertron sputtering[J]. Applied surface science,2011,258(1):399-403.[13] Ramana G Reddy. Fuel Cell and Hydrogen Economy. Journal of Materials Engineering and Performance,2006,15(4): 474-483.[14] H Tawfik, Y Hung, D Mahajan. Metal bipolar plates for PEM fuel cell — A review. Journal of Power Sources,2007, 163(2):755-767.[15] A K Iversen. Stainless steels in bipolar plates-Surface resistive properties of corrosion resistant steel grades during current loads. Corrosion Science,2006,48(5):1036-1058.[16] Richard J Dawson, Anant J Patel, Allan E W Rennie, et al. An investigation into the use of additive manufacture for the production of metallic bipolar plates for polymer electrolyte fuel cell stacks. Journal of Applied Electrochemistry, 2015,45(7):1-9.[17] Viral Mehta, Joyce Smith Cooper. Review and analysis of PEM fuel cell design and manufacturing. Journal of Power Sources,2003,114(1):32-53.[18] Minghsiao Hsieh, Minghung Tsai, Wanjui Shen, et al. Structure and properties of two Al-Cr-Nb-Si-Ti high-entropy nitride coatings[J]. Surface & coatings technology, 2013,188:118-123.[19] Weiyeh Tang, Minghao Chuang, Sujien Lin, et al. Microstructures and Mechanical Performance of Plasma- Nitrided Al0.3CrFe1.5MnNi0.5 High-Entropy Alloys[J]. Metallurgical and Materials Transactions A, 2012,43(7):2390-2400.[20] 梁英教 著. 无机物热力学数据手册[M]. 沈阳：东北大学出版社,1993.[21] Takun Chen, Mingshou Wong, Taotsung Shun, et al. Nanostructured nitride films of multi-element high-entropy alloys by reactive sputtering[J]. Surface and Coatings Technology, 2005, 200, 1361-1365.[22] Ducheng Tsai, Zuechin Chang, Binghau Kuo, et al. Effects of silicon content on the structure and properties of (AlCrMoTaTi) N coatins by reactive magnetron sputtering[J]. Journal of Alloys and Compounds, 2014, 616:646-651.[23] D.C. Tsai, F.S. Shieu, S.Y. Chang, et al. Structures and characterizations of TiVCr and TiVCrZrY ?lms deposited by magnetron sputtering under different bias powers[J]. Electrochem. Soc. 2010,157：K52-K58.
2018, Vol. 25 
