多弧离子镀TiN涂层的N2/Ar流量参数研究
陈昌浩，金永中，陈 建，蔡 瑜，余学金，龙国俊
Study on N2/Ar flow parameters of TiN coating deposited by multi-arc ion plating
CHEN Chang-hao，JIN Yong-zhong，CHEN Jian，CAI Yu，YU Xue-jin，LONG Guo-jun
.
2016, (03): 44
-48
.
DOI: 10.13228/j.boyuan.issn1006-6543.20150055
