高功率脉冲复合直流磁控溅射制备类金刚石薄膜的结构与性能
高 迪，林松盛，许 伟，邹俭鹏，杨洪志
Microstructure and performance of diamond-like carbon films fabricated by high power impulse hybrid DC magnetron sputtering
GAO Di，，LIN Song-sheng，XU Wei，，ZOU Jian-peng，YANG Hong-zhi
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2019, (01): 18
-23
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DOI: 10.13228/j.boyuan.issn1006-6543.20180118
