钼靶材溅射沉积效果差异原因分析
林冰涛，王娜，杨明珲，王承阳，张保红，熊宁
Analysis of difference in sputtering deposition effect of molybdenum target
LIN Bingtao，WANG Na，YANG Minghui，WANG Chengyang，ZHANG Baohong，XIONG Ning
粉末冶金工业
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2022, (03): 127
-130
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DOI: 10.13228/j.boyuan.issn1006-6543.20210108
