烧结温度对镍钨合金靶材微观组织及溅射薄膜性能的影响
高铭, 王文焱, 岳慎伟, 谢敬佩, 杨雷雷, 崔云峰
Effect of sintering temperature on the microstructure and sputtering film performance of the Ni-W alloy target
GAO Ming, WANG Wenyan, YUE Shenwei, XIE Jingpei, YANG Leilei, CUI Yunfeng
粉末冶金工业
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2025, (01): 45
-52
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DOI: 10.13228/j.boyuan.issn1006-6543.20230092
