用射频磁控溅射的方法分别在单晶 Si（100）和304不锈钢基底上制备了FeNiCoCrMn高熵合金薄膜，利用EPMA、XRD、SEM和动电位极化测试，确定薄膜的成分并探讨不同基底温度下沉积的薄膜的相结构、膜厚、形貌以及耐腐蚀性能规律。研究表明：高熵合金薄膜的成分与高熵合金靶材的成分一致，组成元素接近等摩尔比，且薄膜成分均匀；基底温度为100、200、300 ℃沉积的薄膜为非晶结构，基底温度为400 、500 ℃沉积的薄膜为晶体结构；随着基底温度的升高，薄膜的厚度变薄，薄膜表面颗粒越来越大，横截面柱状组织越来越明显；由动电位极化测试的结果得出不同衬底温度沉积的高熵合金薄膜在1 mol/L H2SO4溶液中的耐腐蚀性都优于304不锈钢，且随着衬底温度的升高，薄膜的耐腐蚀性能降低, 其中100 ℃沉积的薄膜的耐腐蚀性能最优。

FeNiCoCrMn high entropy alloy films were deposited by radio frequency magnetron sputtering method in single crystal Si (100) and 304 stainless steel substrate. The composition of the films was analysised by EPMA, the phase structure was analysised by XRD, the films thickness and surface morphologies of films which were deposited under different temperature were analysised by SEM, the potentiodynamic polarization curves of 304 stainless steel and the films were tested in 1 mol/L H2SO4 solution. The results show that element content of target and different regions on the films are consistent, components are close to equal mole ratio and film components uniform, films are amorphous structure under 100 ℃, 200 ℃, 300 ℃, but films are crystal structure under 400 ℃, 500 ℃. With the rise of substrate temperature, films thickness becomes thin, at the same time, particles of film surface are bigger and bigger, columnar structure of cross section is more and more obvious; high entropy alloy films corrosion property in 1 mol/L H2SO4 solution is better than that of 304 stainless steel, and with the increase of substrate temperature, the corrosion property of films is degradative, the corrosion property of films was deposited on 100 ℃ is best.