The present status and development trend of magnetron sputtering Ti target

DONG Ting- yi,,, WAN Xiao- yong,, ZHANG Cheng, HE Jin- jiang, L Bao- guo,

Metallic Functional Materials ›› 2017, Vol. 24 ›› Issue (5) : 57-62.

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Metallic Functional Materials ›› 2017, Vol. 24 ›› Issue (5) : 57-62. DOI: 10. 13228/j. boyuan. issn1005- 8192. 2017028

The present status and development trend of magnetron sputtering Ti target

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 24(5): 57-62 https://doi.org/10. 13228/j. boyuan. issn1005- 8192. 2017028

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