Application Research Process on TiAl Alloy Film in MEMS Field

Application Research Process on TiAl Alloy Film in MEMS Field

SHUI Lu-yu, , YAN Biao,

Metallic Functional Materials ›› 2014, Vol. 21 ›› Issue (3) : 44-48.

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Metallic Functional Materials ›› 2014, Vol. 21 ›› Issue (3) : 44-48.

Application Research Process on TiAl Alloy Film in MEMS Field

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 21(3): 44-48

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