Lanthanum aluminate optical coating material was prepared by solid state synthesis，the phase composition is LaAlO3 and LaAl11O18.The film was obtained by EB-PVD.Optical properties of refractive index and extinction coefficient were researched with the changed of depositing conditions.In the visible region，the refractive index is in the range of 1.65 to 1.8 with the change of depositing processes,and the extinction coefficient is in the magnitude order of 10-4.The material has a promising prospect in industrialization in optical coating due to its superior qualities.
Key words
optical coating material /
solid synthesis /
lanthanum aluminate /
EB-PVC /
refractive index
{{custom_keyword}} /
{{custom_sec.title}}
{{custom_sec.title}}
{{custom_sec.content}}
References
[1] 王东生，于涛，游彪，等. 高介电常数的栅极电介质LaAlO3薄膜的性能研究[J]. 无机材料学报，2003,18(1)：229-232.
[2] 张连翰，孙敦陆，钱小波，等. 高温超导薄膜衬底材料LaAlO3单晶的超光滑表面抛光研究[J]. 人工晶体学报，2002,31(2)：121-123.
[3] 张碧田，张明贤，龚述荣，等. 中折射率光学薄膜用蒸发材料及制备方法[P]. 中国：CN 101363920 B, 2008.
[4] 段华英，王星明，张碧田，等. 高折射率镀膜材料LaTiO3[J]. 稀有金属学报，2008,32(3)：392-394.
[5] 沈伟东，刘旭，叶辉，等.确定薄膜厚度和光学常数的一种新方法[J]. 光学学报，2004,24(7)：885-889.
[6] L.Becerra, C.Merckling, N.Baboux, et al. Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001)[J]. Applied Physics Letters, 2007,91(19)：1929091-1929093.
[7] 殷明志，姚熹，汪敏强，等. 以无机盐为原料溶胶~凝胶工艺制备LaAlO3薄膜[J].硅酸盐学报，2003,31(3):296-299.
[8] 唐晋发，顾培夫，刘旭，等. 现代光学薄膜技术[M]. 浙江：浙江大学出版社, 2006.
{{custom_fnGroup.title_en}}
Footnotes
{{custom_fn.content}}
({{custom_author.role_en}}), {{javascript:window.custom_author_en_index++;}}
