Manufacture, Application and Development of Refractory Metal Target Used on Magnetron Sputtering

Manufacture, Application and Development of Refractory Metal Target Used on Magnetron Sputtering

Metallic Functional Materials ›› 2016, Vol. 23 ›› Issue (6) : 48-52.

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Metallic Functional Materials ›› 2016, Vol. 23 ›› Issue (6) : 48-52.

Manufacture, Application and Development of Refractory Metal Target Used on Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 23(6): 48-52

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